Application:

 

Wafers Loading from cassette to graphite boat and unloading from graphite boat to cassette after deposition process. Compatible to tube PECVD only.

 

 Highlights:

    First launching of wafers transfer device without applying robot in China

   Most cost effective solution

   Lowest maintenance cost;

   Compatible to graphite boat trolleys running in existing cell lines

 

◆  Main Parameters:

 

Type

WILin-line

WOLoff-line

Model

FWT-IL-A

FWT-OL-A

Wafer size

125mm/156mm

125mm/156mm

Wafer thickness

130~240um

130~240um

Fragment rate

<0.1%

<0.1%

Throughput

1800 pcs/h

2880 pcs/h

DimensionL×W×H

3710X2000X2345mm

3710X2000X2345mm

UP-TIME

97%

97%

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