Application:

 

Wafers Loading from cassette to graphite boat and unloading from graphite boat to cassette after deposition process. Compatible to tube PECVD only.

 

 Highlights:

    First launching of wafers transfer device without applying robot in China

   Most cost effective solution

   Lowest maintenance cost;

   Compatible to graphite boat trolleys running in existing cell lines

 

◆  Main Parameters:

 

Type WILin-line WOLoff-line
Model FWT-IL-A FWT-OL-A
Wafer size 156mm/162.75mm 156mm/162.75mm
Wafer thickness 140um 140um
Breakage rate <0.05% <0.05%
Throughput 4800 pcs/h 4800 pcs/h
DimensionL×W×H 7000X2100X2000mm 7000X2100X2000mm
UP-TIME 99% 99%

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